PED device "Pioneer 180 PED System"
Quickly evaporate the target material with a high-energy pulsed electron beam! It is possible to form films of all solid materials.
The "Pioneer 180 PED System" is a PED (Pulsed Electron Deposition) device that, like PLD, enables the formation of thin films with complex physical properties for various devices using the pulsed electron deposition method. With a high-energy pulsed electron beam (pulse width of 80-100 ns, <1000A, 15kV), it is capable of rapidly evaporating the target material, allowing for the deposition of all solid materials. The substrate size can accommodate diameters from 10mm to 2 inches, and the substrate can be heated up to 850°C using radiant heating. 【Features】 ■ The pulsed electron deposition method allows for the formation of thin films with complex physical properties for various devices, similar to PLD. ■ The high-energy pulsed electron beam (pulse width of 80-100 ns, <1000A, 15kV) enables rapid evaporation of the target material, allowing for the deposition of all solid materials. *For more details, please refer to the PDF document or feel free to contact us.
- 企業：ハイテック・システムズ
- 価格：Other
